12 units
This course covers advanced design of integrated MicroElectroMechanical Systems (MEMS) as the basis for futuristic sensor and actuator systems on chip. The course starts with design of low-level device details and builds to design of "VLSI MEMS." Topics include layout vs. process design; analysis and modeling of micromechanics, thermomechanics, capacitive sensing, and coupled electromechanics; noise; test structures and characterization; modulation and switched-capacitor interface circuits; and system design. Homework and projects will make intensive use of MEMS schematic design; behavioral modeling with analog hardware description languages; layout generation and synthesis tools; visualization tools; and MEMS design rules and extraction. Assigned readings of recent advances in MEMS design are actively discussed. A final project centers on a complete microsystem design within a post-CMOS micromachined process. Possible systems include sensor/actuator arrays for inertial, ultrasonic, RF, micropositioning, acoustic, optic or fluidic applications.
Prerequisites: 18-614 or equivalent by petition of instructor and senior or graduate standing.
Last updated on March 21, 2007
Circuits
Circuits
Depth
F05
Please note that the course history information is incomplete and/or may reflect different courses offered under the same course number.